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Analysis of contact layers in miniature electrical relays with Auger electron spectroscopyKoller, Lidija ...S spektroskopijo Augerjevih elektronov smo študirali strukturo površine kontaktov miniaturnih električnih relejev. Poleg zlata, železa, niklja in kobalta, ki sestavljajo kontaktno zlitino, smo ... detektirali presenetljivo velike količine ogljika, žvepla, kisika in kalcija. Z namenom, da bi izboljšali tehnologijo relejskih kontaktov, smo raziskovali različne faze tehnološkega postopka. Podajamo nekaj modelov, s katerimi razlagamo obnašanje elementov nečistoč pod različnimi eksperimentalnimi pogoji, kot so temperatura, proces ionskega jedkanja itd.Source: Informacije MIDEM : časopis za mikroelektroniko, elektronske sestavne dele in materiale = časopis za mikroelektroniku, elektronske sastavne dijelove i materijale = journal of microelectronics, electronic components and materials. - ISSN 0352-9045 (25, 1, 1995, str. 33-36)Type of material - article, component partPublish date - 1995Language - slovenianCOBISS.SI-ID - 17303557
Author
Koller, Lidija |
Praček, Borut |
Vrhovec, Stane |
Railič, Drago
Topics
električni kontakti |
kakovost kontaktov |
čiščenje površin kontaktov |
naprševalno-jedkalni procesi |
Augerjeva elektronska spektroskopija |
AES |
kontaktne zlitine |
detekcija nečistoč |
nečistoče zlitin |
sestava površin kontaktov |
AES analize |
ionsko jedkanje |
electrical contacts |
miniature relays |
contact quality |
cleaning of contacts surfaces |
sputler-etching processes |
AES Auger electron spectroscopy |
contact surface contamination |
impurities of alloys |
impurity detection |
contact alloys |
surface composition of contacts |
AES analysis |
ion etching
Shelf entry
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Database name | Field | Year |
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Koller, Lidija | 01703 |
Praček, Borut | 09105 |
Vrhovec, Stane | |
Railič, Drago | 04565 |
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