Keuter, Philipp; Moritz to Baben; Aliramaji, Shamsa; Schneider, Jochen M
arXiv.org,
03/2023
Paper, Journal Article
The temperature-dependent composition and phase formation during physical vapor deposition (PVD) of Mg-Ca thin films is modelled using a CALPHAD-based approach. Considering the Mg and Ca sublimation fluxes calculated based on the vapor pressure obtained by employing equilibrium thermochemical calculations, experimentally observed synthesis temperature trends in thin film composition and phase formation are reproduced. The model is a significant step towards understanding how synthesis parameters control composition and thereby phase formation in PVD of metals with high vapor pressures.
It was not necessary to add the material to the shelf.
Bibliographic material was successfully added on shelf.
Adding bibliographical material on shelf was not successful.
Material is already on the shelf.
Permalink
URL:
Impact factor
Access to the JCR database is permitted only to users from Slovenia. Your current IP address is not on the list of IP addresses with access permission, and authentication with the relevant AAI accout is required.
Year
Impact factor
Edition
Category
Classification
JCR
SNIP
JCR
SNIP
JCR
SNIP
JCR
SNIP
Select the library membership card:
DRS,
in which the journal is indexed
Database name
Field
Year
Links to authors' personal bibliographies
Links to information on researchers in the SICRIS system
