The redistribution of elements in a multicomponent oxyfluoride glass is induced by a 250 kHz femtosecond laser. Elemental distribution in the cross section of the modified region along the laser propagation axis is analyzed by an electron microprobe analyzer. The results indicate that the relative concentrations of network formers of the glass are higher in the central area of the modified region and lower in the periphery of the modified region compared with the unirradiated areas. However, the relative concentrations of network modifiers are as opposed to that of network formers. Fluorescence spectra confirm that the distribution of fluorescence intensity of Yb(3+) in the modified region is consistent with that of its concentration. The effects of spherical aberration of the incident beam on the elemental redistribution are also discussed.