The paper reports on the effect of the substrate temperature (350 °C, 380 °C and 420 °C) during reactive magnetron sputtering of a TiN film on the phase composition, texture and mechanical properties of TiN/TiO2 coatings on 304L stainless steel substrates. Pure Ti was used as a cathode source of Ti. The texture and unit cell parameters of both TiN and TiO2 phases of the coating are discussed in relation with the tribological properties and adhesion of the coating. The scratch tests performed showed that the nitride deposited at 380 °C, having the highest unit cell parameter and a predominant (111) texture, possessed the lowest friction coefficient (μ), tangential force and brittleness. The anatase-type TiO2 with predominant (101) pole density and increased c unit cell parameter showed the highest stability on the nitride deposited at 420 °C. The results indicated that the friction coefficient, tangential force and critical forces of fracture could be varied by controlling the coating deposition temperature.