•Influencing parameters of the flame optimization schemes are summarized.•Influence parameters of the micro-thermal photoelectric system are analyzed.•Influence parameters of the thermoelectric conversion efficiency are investigated.•Technical limitations and development of the micro power equipment are summarized. Hydrocarbon fuel and hydrogen are used as fuels for micro power equipment to replace traditional batteries and provide energy for micro-electromechanical systems, which has become a hot research direction. However, due to the reduction in the size of micro power equipment, not only the flame in the micro combustor is affected, but the overall energy conversion efficiency of micro power equipment is also affected by the size effect. Therefore, it is significance to analyze the energy loss and design optimization methods pertinently from the point of energy conversion. In the past ten years, many researchers have done research about the direction, which has been reviewed in this article. For the flame optimization, the influencing parameters of optimization methods such as exhaust gas recirculation, cavity combustor, bluff body combustor, porous media combustion, and hydrocarbon fuels mixed with hydrogen are summarized. For the micro-thermal photoelectric system, the influence parameters of combustion efficiency, radiant efficiency, spectral efficiency, view factor efficiency and photovoltaic cell efficiency are analyzed. In the micro-thermoelectric system, the influence parameters of combustion efficiency, heat conduction efficiency and thermoelectric conversion efficiency are analyzed. For the micro internal combustion engine, the influencing parameters of combustion efficiency and conversion efficiency are analyzed. Finally, the technical limitations and development of each micro power equipment are summarized in this article.