In order to obtain a proper and accelerated osseointegration process, continuous efforts for improving the surface of the implants have been made. The physical texture, structure and mechanical properties of the implant surface are known to be an important factor in bone-implant interaction. Trying to find a solution for weak osseointegration, new modification techniques should be used and examined. In the particular study, the Ti5Al4V and Ti6Al4V alloys with different initial structure and composition were vacuum heat treated at different technological parameters in order to obtain maximum strengthening. One and the same electron beam surface modified (EBSM) by scanning electron beam was subsequently carried out for both alloys and their surface characteristics and mechanical properties were revealed by metallographic analysis, roughness, XRD and hardness measurements. The results revealed that under the selected conditions of treatment, a specific wave-like topography was obtained. The mean grains' sizes, depth of the structural changes after the surface modification and hardness and crystal lattices' changes of both alloys was assessed depending on the differences in the composition, initial structural and mechanical characteristics of the alloys in the different heat-treated conditions.