Optical and mechanical properties of fluorocarbon coatings formed in a matrix mode of deposition using an atmospheric pressure plasmatron

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Optical and mechanical properties of fluorocarbon coatings formed in a matrix mode of deposition using an atmospheric pressure plasmatron

Shvedov, A V; Elinson, V M; Shchur, P A; Kirillov, D V

Journal of physics. Conference series, 09/2019, Volume: 1313, Issue: 1

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This paper is devoted to study of the formation of fluorocarbon coatings, which were obtained by using a low-frequency plasmatron of a low-temperature plasma at atmospheric pressure. The possibility of forming fluorocarbon coatings on silicon, and PET and polystyrene substrates is shown. The spectra of the UV and visible ranges were obtained, the width of the band gap of the obtained coatings was established by the Tauc method. The nanohardness of the obtained coatings was studied by the Oliver-Farr method.

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Shvedov, A V | Elinson, V M | Shchur, P A | Kirillov, D V

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