A high‐performance W/B4C multilayer mirror with 80 periods of nominally 1.37 nm was measured by grazing‐incidence small‐angle X ray scattering (GISAXS) in order to analyse the lateral and vertical ...correlations of the interface roughness within the framework of a scaling concept of multilayer growth. A dynamic growth exponent z = 2.19 (7) was derived, which is close to the value predicted by the Edwards–Wilkinson growth model. The effective number of correlated periods indicates a partial replication of the low interface roughness frequencies. A simulation of the GISAXS pattern based on the Born approximation suggests a zero Hurst fractal parameter H and a logarithmic type of autocorrelation function. The as‐deposited mirror layers are amorphous and exhibit excellent thermal stability up to 1248 K in a 120 s rapid thermal vacuum annealing process. At higher temperatures, the B4C layers decompose and poorly developed crystallites of a boron‐rich W–B hexagonal phase are formed, and yet multilayer collapse is not complete even at 1273 K. Ozone treatment for 3000 s in a reactor with an ozone concentration of 150 mg m−3 results in the formation of an oxidized near‐surface region of a thickness approaching ∼10% of the total multilayer thickness, with a tendency to saturation.
A high-performance W/B
4
C multilayer mirror with 80 periods of nominally 1.37 nm was measured by grazing-incidence small-angle X ray scattering (GISAXS) in order to analyse the lateral and vertical ...correlations of the interface roughness within the framework of a scaling concept of multilayer growth. A dynamic growth exponent
z
= 2.19 (7) was derived, which is close to the value predicted by the Edwards–Wilkinson growth model. The effective number of correlated periods indicates a partial replication of the low interface roughness frequencies. A simulation of the GISAXS pattern based on the Born approximation suggests a zero Hurst fractal parameter
H
and a logarithmic type of autocorrelation function. The as-deposited mirror layers are amorphous and exhibit excellent thermal stability up to 1248 K in a 120 s rapid thermal vacuum annealing process. At higher temperatures, the B
4
C layers decompose and poorly developed crystallites of a boron-rich W–B hexagonal phase are formed, and yet multilayer collapse is not complete even at 1273 K. Ozone treatment for 3000 s in a reactor with an ozone concentration of 150 mg m
−3
results in the formation of an oxidized near-surface region of a thickness approaching ∼10% of the total multilayer thickness, with a tendency to saturation.
Results from a new type of stationary microfocusing sealed tube X‐ray source will be presented here. Measurements obtained with the new low maintenance, high brilliance microfocus source IμS™ ...equipped with different 2‐dimensional beam shaping multilayer optics are shown. A comparison of the IμS source with typical sealed tube fine focus systems shows data of outstanding quality achieved in diffractometry applications using a 2‐dimensional detector. A large improvement in intensity (by a factor of about 16) was observed. Very promising results were achieved when measuring powders in transmission geometry using the IμS. With this way of focusing on the detector, better crystallite statistics and better resolution were provided. Intensity gain factors in the range of 100 were possible with some applications. For small angle scattering a factor of five was observed when using an IμS with optics for a parallel beam in comparison to a typical sealed tube instrument.
Results from a new type of stationary microfocusing sealed tube X‐ray source are presented here and compared to results from classical systems and an improvement in intensity by a factor of 5 to 100 is demonstrated. Applications for crystallite and powder XRD as well as Small Angle Scattering are discussed thoroughly.
