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  • Deposition of Nanostructure... Deposition of Nanostructured Tungsten Oxide Layers by a New Method: Periodic Modulation of the Deposition Angle
    Sychov, Maxim; Eruzin, Alexander; Semenova, Anna ... Langmuir, 09/2023, Letnik: 39, Številka: 35
    Journal Article
    Recenzirano

    Periodic modulation of the deposition angle (PMDA) is a new method to deposit nanostructured and continuous layers with controllable periodic density fluctuation. The method is used for the magnetron ...
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