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  • Influence of STI stress on ...
    Wils, N.; Tuinhout, H.; Meijer, M.

    2008 IEEE International Conference on Microelectronic Test Structures, 2008-March
    Conference Proceeding

    Using a dedicated set of - asymmetrically designed - matched pair test structures and a data analysis technique based on so-called mismatch sweeps, we answer some important questions in the discussions on variability in advanced CMOS technologies.