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Yeh, Chien-Hung; Chang, Kai-Chun; Lin, Yun-Hsuan; Chang, Ting-Chang; Chang, Yen-Cheng; Chen, Wen-Chung; Jin, Fu-Yuan; Ciou, Fong-Min; Lin, Yu-Shan; Hung, Wei-Chun; Huang, Jen-Wei; Tsai, Tsung-Ming; Sze, Simon M.
IEEE electron device letters, 03/2021, Letnik: 42, Številka: 3Journal Article
This study focuses on the interaction between the oxide layer area of a transistor and its ferroelectric layer area. An experimental comparison of transistor oxide layer area demonstrates that the larger the ratio of oxide to ferroelectric layers, the larger the on/off ratio, thus improving performance. A subsequent experiment aimed to further demonstrate this in different sized devices, and changing the ratio of <inline-formula> <tex-math notation="LaTeX">\text{A}_{\text {HZO}}/\text{A}_{\text {SiO2}} </tex-math></inline-formula> (the area of HfZrO x divided by oxide layer) showed the same tendency as above, but also produced an unexpected finding in that a comparison of on/off ratio exhibits an abnormal electric characteristic. This study discusses this abnormal electric characteristic and proposes an explanatory physical model.
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JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
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in: SICRIS
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