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Li, Ning; Chen, Xiang-Dong; Chen, Xin-Peng; Ding, Xing; Zhao, Xuan
IEEE electron device letters, 2018-Jan., 20180101, Letnik: 39, Številka: 1Journal Article
In this letter, a MoS 2 -based humidity sensor braced by SiO 2 microsphere layers with rapid response was developed. The results demonstrated that the humidity sensor can exhibit a subsecond response. A mechanism based on the morphology and structure of the sensing film was proposed to explain the rapid response behavior of humidity sensors. In addition, the effect of film thickness on response time was discussed. This letter demonstrated that the MoS 2 -based humidity sensor braced by SiO 2 microspheres is suitable for the miniature drip infusion rate detection device.
