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Chih-Hung Lin; Shoou-Jinn Chang; Ting-Jen Hsueh
IEEE electron device letters, 2017-Feb., Letnik: 38, Številka: 2Journal Article
In this letter, a WO 3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO 3 nanoparticle gas sensor prepared at an annealing temperature of 400°C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO 3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150°C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.
