Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs + at angles of incidence above 50° to normal

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Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs + at angles of incidence above 50° to normal

Kelly, J.H.; Dowsett, M.G.; Augustus, P.; Beanland, R.

Applied surface science, 2003, Letnik: 203

Journal Article

The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs + at glancing impact angles. The deterioration was eliminated for 1 keV Cs + at 60° using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm.

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Kelly, J.H. | Dowsett, M.G. | Augustus, P. | Beanland, R.

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Leto	Faktor vpliva		Izdaja		Kategorija		Razvrstitev
Leto	JCR	SNIP	JCR	SNIP	JCR	SNIP	JCR	SNIP

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