Abrasive waterjet peening (AWJP) has been used to modify the mechanical properties of components by introducing plastic deformation and compressive residual stress (CRS) into the workpiece surface. The present study aims to investigate the influence of different AWJP parameters on the surface integrity of Inconel 718 alloy. The AWJP with different pump pressures, standoff distances, traverse speeds, and abrasive flowrates are conducted on the Inconel 718 workpiece. The surface integrity response including surface topography, CRS, hardness, and microstructure of AWJP are investigated, and different AWJP parameters effect on changing trend of surface integrity response is discussed. Results show that the AWJP-treated workpiece with different parameters formed a footprint width of 3.0–4.3 mm, the key factor effect on footprint width is standoff distance. The maximum surface roughness of Sa = 9.06 μm occurs at pump pressure 300 MPa, and pump pressure is more sensitive than other AWJP parameters' effect on surface fluctuation and surface roughness. The thickness of the stress layer is approximately 100–180 μm, and the maximum CRS is larger than 1100 MPa. Pump pressure and standoff distance are two main factors that effect on CRS, while the changing rate effect on CRS is gradually slow with the increase of pump pressure and the reduction of standoff distance. The maximum hardness increases more than 20 % from 490 to 590 HV at a pump pressure of 300 MPa. The pump pressure is the key factor influencing on micro-hardness. The microstructure evolution on the sub-surface of AWJP treated workpiece was characterized by SEM and EBSD, which showed that grains refine and strengthening layer formed on the top surface of the AWJP-treated workpiece surface, also the cracks at pump pressure 300 MPa. The results revealed that AWJP has great development potential in Inconel 718 surface treatment, and pump pressure is the key factor that effect on surface integrity. •Abrasive waterjet peening (AWJP) was performed on Inconel 718 alloy.•Surface topography surface roughness Sa is mainly affected by pump pressure.•The compressive residual stress (CRS) induced by AWJP is larger than 1000 MPa.•Maximum hardness occurs at pump pressure 300 MPa and increases larger than 20 %.•The near-surface grains are significantly refined with the action of the AWJP.