We developed a novel technique to obtain 3D-imaging of elemental distribution based on multi-angle RBS measurement and micro-beam scanning. Since cross-sections of RBS are too small to obtain 3D-imaging, it is necessary to measure scattered particles with large solid angle detectors. Hence, the RBS profiles from each scattering angle are superposed and a true depth profile cannot be obtained. Recently, a large solid angle X-ray detector array consisting of 45 detector elements was installed at the TIARA facility of Japan Energy Research Institute. Each detector element measures X-rays as well as scattered particles. For this utilization, we introduced a technique to superpose RBS profiles and applied it to the surface analysis of an ant’s head.