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  • Sensitive and Selective Pho...
    Schjolberg-Henriksen, K.; Schulz, O.; Ferber, A.; Moe, S.; Lloyd, M.; Muller, G.; Suphan, K.-H.; Wang, D.T.; Bernstein, R.W.

    IEEE sensors journal, 09/2008, Letnik: 8, Številka: 9
    Journal Article

    Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC.