Študij rasti titanovega silicida

Central Technological Library of the University of Ljubljana (CTK)

Študij rasti titanovega silicida

Godec, Matjaž ...

Silicidi so zadnjih deset let tema intenzivnih raziskav, predvsem zaradi vse pogostejše uporabe v integriranih vezjih. Med njimi je najpomemnejši ▫$TiSi_2$▫ zaradi nizke električne upornosti, velike ... stabilnosti in kompaktibilnosti s procesom izdelave integriranih vezij. Predstavljeni so modeli napovedovanja nastanka prve faze oziroma zaporedja nastanka faz pri pregrevanju So-Ti sistema. Na primeru večplastne strukture je prikazan študij rasti titanovega silicida. Nastanek posameznih silicidnih faz smo zasledovali z in-situ meritvijo upornosti, s presevno elektronsko mikroskopijo prerezov (XTEM), z rentgensko difraktografijo in z Augerjevo profilno analizo.

Source: Kovine zlitine tehnologije = Metals alloys technologies. - ISSN 1318-0010 (Let. 29, št. 1-2, januar-junij 1995, str. 315-318)

Type of material - article, component part

Publish date - 1995

Language - slovenian

COBISS.SI-ID - 17108741

Link(s):
Digitalna knjižnica Slovenije - dLib.si

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Author
Godec, Matjaž | Panjan, P. | Cvelbar, A. | Navinšek, B. | Zalar, A.

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source: Kovine zlitine tehnologije = Metals alloys technologies. - ISSN 1318-0010 (Let. 29, št. 1-2, januar-junij 1995, str. 315-318)

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Source: Personal bibliographies and: SICRIS

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