Fundamentals of microfabrication : the science of miniaturization; Microfabrication

Faculty of Mechanical Engineering, Lj. (FSLJ)

Fundamentals of microfabrication : the science of miniaturization

Madou, Marc J.

Type of material - book

Edition - 2nd ed.

Publication and manufacture - Boca Raton [etc.] : CRC Press, cop. 2002

Language - english

ISBN - 0-8493-0826-7

COBISS.SI-ID - 5498651

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K 681 MADOU M. Fundamentals IN: 00047455	on loan - outside loan, due date: not specified

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