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  • Characterization of ZrO2 th... Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials
    Brunet, Magali; Scheid, Emmanuel; Galicka-Fau, Karolina ... Microelectronic engineering, 2009, Letnik: 86, Številka: 10
    Journal Article
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    The present work deals with high-density integrated capacitors for output filters in future micro DC-DC converters. To reach high capacitance density, 3D structures were created in silicon with DRIE ...
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