UP - logo
(UL)
  • Ion-getter pump regeneration with oxygen
    Pregelj, Andrej ; Drab, Marjan ; Jenko, Monika
    Ion-getter (IG) pumps are commonly used to creqte ultra high vacuum (UHV). They are very clean, they pumo different gasses, don't cause vibrations, enable the pressure reading and in long lifetime ... need no maintenance. After many years of pumping, particularly if they have pumped at higher pressures (p>▫$10^{-5}$▫ mbar), the wall surfaces lost good capture characteristics. The electrodes changing and thorough cleaning of inner surfaces become necessarily. With experiences, got in developing our own IG pump, a regenration of such elements was introduced in our proposal programme and different foreign pumps were already renewed. Besides a general view of operation and manufacturing technics the contribution represents the renew procedure including oxidation treatment.
    Vir: Final programme and book of abstracts (Str. 75)
    Vrsta gradiva - prispevek na konferenci ; neleposlovje za odrasle
    Leto - 2000
    Jezik - angleški
    COBISS.SI-ID - 227242

Vnos na polico