•The effect of the LIPSS process on the surface chemical properties and consequently on SEY is investigated.•Femtosecond Laser-Induced Periodic Surface Structures (LIPSS) are used to reduce SEY in copper.•Copper treated with LIPSS shows a low surface debris density and is therefore less critical for ultra-high vacuum applications in particle accelerators. The electron-cloud phenomenon is one cause of beam instabilities in high intensity positive particle accelerators. Among the proposed techniques to mitigate or control this detrimental effect, micro-/nano-geometrical modifications of vacuum chamber surfaces are promising to reduce the number of emitted secondary electrons. Femtosecond laser surface structuring readily allows the fabrication of Laser Induced Periodic Surface Structures (LIPSS) and is utilized in several fields, but has not yet been tested for secondary electron emission reduction. In this study, such treatment is carried out on copper samples using linearly and circularly polarized femtosecond laser pulses. The influence of the formed surface textures on the secondary electron yield (SEY) is studied. We investigate the morphological properties as well as the chemical composition by means of SEM, AFM, Raman and XPS analyses. Surface modification with linearly polarized light is more effective than using circularly polarized light, leading to a significant SEY reduction. Even though the SEY maximum is only reduced to a value of ~1.7 compared to standard laser-induced surface roughening approaches, the femtosecond-LIPSS process enables to limit material ablation as well as the production of undesired dust, and drastically reduces the number of redeposited nanoparticles at the surface, which are detrimental for applications in particle accelerators. Moreover, conditioning tests reveal that LIPSS processed Cu can reach SEY values below unity at electron irradiation doses above 10−3 C/mm2. Display omitted